• X, Y, Z, Rz four-axis stages
• Isolation system with active force cancellation and active leveling
• Class 100 cleanliness compatible
The X&Y Positioning System contains a gantry type of X&Y stages for long range moves and Yaw
controllability for fine orthogonality adjustments. The well-thought static and dynamic structural design
and frictionless air bearing stages, combined with Sioux sMA-RT control technology, provide superior
static and dynamic performance with fast responses and low velocity ripple.
Z&Rz Positioning System is designed with compact size to fit for customer’s strict space requirements.
Z axis, combined with Sioux sMA-RT control technology, is a servo system for real time and high
accuracy Z positioning. Rz axis has high rotational resolution for accurate positioning while stiff braking
system eliminates rotational resonances.
Besides isolation system, UPSS 1.0 system provides force cancellation, active leveling functionalities
for high level of dynamic response. With active isolation system, settling time can be improved by over
80% compared without it.
SAXCS control platform provides a flexible control solution according to customers’ request. Sioux
control system expert can customize the core of control algorithms to meet any challenge of customer
applications. Model based development and high compatibility to COTS ensures both fast time to
market and reliable solutions.
UPSS 1.0 positioning system is ideally suitable for many high-precision application, such as wafer
inspection, wafer metrology, photonics, and flat panel display manufacturing.
* Higher accuracy is available upon requests.
